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Epitaxial Reactor Operator Salary
in Chicago, Illinois

$36,274 (USD)

Average Salary


Average Hourly


Average Bonus

Last updated: May 23, 2019

Salary Recap

The average pay for an Epitaxial Reactor Operator is $36,274 a year and $17 an hour in Chicago, Illinois, United States. The average salary range for an Epitaxial Reactor Operator is between $27,750 and $43,249. This compensation analysis is based on salary survey data collected directly from employers and anonymous employees in Chicago, Illinois.

Average Salary Chart

Scroll for Salary Potential, Education and Skills

Job Summary

  • Controls and monitors operation of epitaxial reactor to deposit layer of semiconductor material, such as gallium arsenide or silicon, onto semiconductor wafer surface in production of electronic components, such as transistors, diodes, and integrated circuits, and tests sample processed wafers to evaluate epitaxial layer properties, such as thickness and resistivity, using testing equipment: cleans semiconductor wafers, using cleaning equipment such as chemical baths and automatic wafer cleaners, to prepare wafers for deposit of epitaxial layer.
  • Places wafers on wafer holder (suspector), using tweezers or vacuum wand, to load reactor.
  • Pushes buttons, flips switches, turns dials, and observes gauges to set and adjust reactor temperature and gas pressure to specified levels and to start reactor cycle.
  • Monitors temperature and gas gauges during processing cycle and turns dials to adjust temperature and gas levels.
  • Tests epitaxial layer on wafers, using testing equipment, to evaluate thickness and resistivity of layer.
  • Records production data in logbook and processing documents.
  • Cleans and maintains equipment and work area.
  • May compute production statistics, using calculator.
Epitaxial Reactor Operator Job Prevalence in Chicago, Illinois, United States

Job family: Semiconductor Processors

Job family population: 23,540

Estimated population of Epitaxial Reactor Operator jobs: 1,275

Rate of error: 5.4%

Salary Potential

Estimated salary in 2024:
5 Year Change:
16 %


Education data not available for this job


Skills data not available for this job

About Chicago, Illinois

Chicago Cost of Living Score:

Description: Chicago ( (listen), locally also ), officially the City of Chicago, is the most populous city in Illinois, as well as the third most populous city in the United States. With an estimated population of 2,716,450 (2017), it is the most populous city in the Midwest. Chicago is the principal city of the Chicago metropolitan area, often referred to as Chicagoland, and the county seat of Cook County, the second most populous county in the United States. The metropolitan area, at nearly 10 million people, is the third-largest in the United States. Located on the shores of freshwater Lake Michigan, Chicago was incorporated...

Epitaxial Reactor Operator Job Listings for Chicago, Illinois

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